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PHOTOCHEMICAL VAPOUR DEPOSITION OF THIN FILMS

著者名:
Irvine, S.J.C.  
掲載資料名:
Chemical physics of thin film deposition processes for micro- and nano-technologies
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry
シリーズ巻号:
55
発行年:
2002
開始ページ:
199
終了ページ:
222
総ページ数:
24
出版情報:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402005244 [1402005245]
言語:
英語
請求記号:
N17050/55
資料種別:
国際会議録

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