THIN FILM DEPOSITION BY SOL-GEL AND CVD PROCESSING OF METAL-ORGANIC PRECURSORS
- 著者名:
- Mathur, S.
- 掲載資料名:
- Chemical physics of thin film deposition processes for micro- and nano-technologies
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 55
- 発行年:
- 2002
- 開始ページ:
- 91
- 終了ページ:
- 118
- 総ページ数:
- 28
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402005244 [1402005245]
- 言語:
- 英語
- 請求記号:
- N17050/55
- 資料種別:
- 国際会議録
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5
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