Pressure sensor based on a microstructure with dual silicon nitride vibrating beams

Pressure sensor based on a microstructure with dual silicon nitride vibrating beams

著者名:

Chen, D.Y. ( Institute of Electronics (China) )
Cui, D.F.
Wang, L.
Gao, X.T.
Fan, Z.Y.

掲載資料名:

Smart structures, devices, and systems : 16-18 December 2002 Melbourne, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4935

発行年:

2002

開始ページ:

287

終了ページ:

295

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447302 [0819447307]

言語:

英語

請求記号:

P63600/4935

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012783
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Smart Structures, Devices, and Systems
回次:	2002
会議開催地:	Melbourne, Australia
会議開催年:	2002.12.16-2002.12.18

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