Mechanical and Electrical Design of a Novel RF MEMS Switch for Cryogenic Applications
- 著者名:
- Zhang, H. ( University of Colorado at Boulder )
- Bright, Victor M.
- Lee, Y.C.
- Gupta, K.C.
- 掲載資料名:
- Proceedings : 2002 International Symposium on Microelectronics : September 4-6, 2002, Colorado Convention Center, Denver, CO
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4931
- 発行年:
- 2002
- 開始ページ:
- 372
- 終了ページ:
- 376
- 総ページ数:
- 5
- 出版情報:
- Washington, DC: IMAPS
- ISSN:
- 0277786X
- ISBN:
- 9780930815660 [0930815661]
- 言語:
- 英語
- 請求記号:
- P63600/4931
- 資料種別:
- 国際会議録
類似資料:
IMAPS, SPIE-The International Society for Optical |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering | |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |