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Silicon microchannel array based on MEMS process

著者名:
Duanmu, Q.D. ( Changchun Univ. of Science and Technology (China) )
Li, Y.
Jiang, D.L.
Gao, Y.J.
Fu, L.C.
Tian, J.Q.
さらに 1 件
掲載資料名:
MEMS/MOEMS Technologies and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4928
発行年:
2002
開始ページ:
237
終了ページ:
240
総ページ数:
4
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447173 [081944717X]
言語:
英語
請求記号:
P63600/4928
資料種別:
国際会議録

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