Polar-coordinate laser writer: analysis of exposure dose distribution

Polar-coordinate laser writer: analysis of exposure dose distribution

著者名:

Xie, Y.J. ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
Lu, Z.W.
Li, F.Y.
Weng, Z.C.

掲載資料名:

Optical design and testing : 15-18 October 2002, Shanghai, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4927

発行年:

2002

開始ページ:

381

終了ページ:

384

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447166 [0819447161]

言語:

英語

請求記号:

P63600/4927

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012776
シリーズID:	PA00000029
会議名:	Photonics Asia : Optical Design and Testing
回次:	2002
会議開催地:	Shanghai, China
会議開催年:	2002.10.15-2002.10.18

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