Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control

Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control

著者名:

Cheng, S.-W. ( Zhejiang Univ. (China) )
Zhang, H.-J.
Wang, X.-J.

掲載資料名:

Advanced materials and devices for sensing and imaging : 17-18 October 2002, Shanghai, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4919

発行年:

2002

開始ページ:

393

終了ページ:

400

総ページ数:

8

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447081 [0819447080]

言語:

英語

請求記号:

P63600/4919

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012768
シリーズID:	PA00000029
会議名:	Photonics Asia : Advanced materials and devices for sensing and imaging
回次:	2002
会議開催地:	Shanghai, China
会議開催年:	2002.10.17-2002.10.18

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