New nanoporous low-dielectric-constant material for TFT passivation

New nanoporous low-dielectric-constant material for TFT passivation

著者名:

Lin, S.-S. ( Industrial Technology Research Institute (Taiwan China) )
Lee, R.-J.

掲載資料名:

Materials, Devices, and Systems for Display and Lighting

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4918

発行年:

2002

開始ページ:

294

終了ページ:

302

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447074 [0819447072]

言語:

英語

請求記号:

P63600/4918

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012767
シリーズID:	PA00000029
会議名:	Photonics Asia : Materials, devices, and systems for display and lighting
回次:	2002
会議開催地:	Shanghai, China
会議開催年:	2002.10.15-2002.10.17

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