Fabrication of silica-on-silicon waveguide devices by PECVD
- 著者名:
Lin, S.F. ( Luminent Inc. (Taiwan) ) Hou, J.P. Chiu, C.H. Lin, J.Y. Chu, T.C. ( National Taiwan Univ. (Taiwan China) ) Tsai, D.P. Chu, A.K. ( National Sun Yat-Sen Univ. (Taiwan China) ) - 掲載資料名:
- Optical fiber and planar waveguide technology II : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 16-18 October 2002, Shanghai, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4904
- 発行年:
- 2002
- 開始ページ:
- 338
- 終了ページ:
- 344
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446930 [0819446939]
- 言語:
- 英語
- 請求記号:
- P63600/4904
- 資料種別:
- 国際会議録
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