Study on an inspection method of repeated pattern: automatic pattern inspection for TFT LCD
- 著者名:
- Lim, D.C. ( LG Electroncis (South Korea) )
- Yun, S.-Y.
- Jeong, D.H.
- Hong, C.-K.
- 掲載資料名:
- Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4902
- 発行年:
- 2002
- 開始ページ:
- 486
- 終了ページ:
- 491
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446893 [0819446890]
- 言語:
- 英語
- 請求記号:
- P63600/4902
- 資料種別:
- 国際会議録
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8
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