Experimental and numerical studies of the response of photomask hard pellicles to acoustic excitation

Experimental and numerical studies of the response of photomask hard pellicles to acoustic excitation

著者名:

Cotte, E.P. ( Univ. of Wisconsin/Madison (USA) )

Reu, P.L.

Engeistad, R.L.

Lovell, E.G.

Grenville, A. ( International SEMATECH (USA) )

Van Peski, C.K.

さらに 1 件

掲載資料名:

22nd Annual BACUS Symposium on Photomask Technology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4889

発行年:

2002

巻:

Part Two

開始ページ:

1121

終了ページ:

1132

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819446756 [0819446750]

言語:

英語

請求記号:

P63600/4889

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012737
シリーズID:	PA00000029
会議名:	Annual BACUS Symposium on Photomask Technology
回次:	22nd
会議開催地:	Monterey, California, USA
会議開催年:	2002.10.01-2002.10.04

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2 国際会議録 Numerical and experimental studies of pellicle-induced photomask distortions Cotte,E.P., Engelstad,R.L., Lovell,E.G., Shkel,Y.M., Eschbach,F.O., Shu,E.Y., Tanzil,D., Calhoun,R.M. SPIE-The International Society for Optical Engineering	8 国際会議録 Experimental model verification of the thermal response of optical reticles Abdo,A.Y., Reu,P.L., Schlax,M.P., Engelstad,R.L., Beckman,W.A., Mitchell,J.W., Lovell,E.G. SPIE-The International Society for Optical Engineering
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