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Optical characterization of high-k dielectrics HfO2 thin films obtained by MOCVD

著者名:
Modreanu, M. ( National Microelectronics Research Ctr. (Ireland) )
Hurley, P.K.
O'Sullivan, B.J.
O'Looney, B.
Senateur, J.-P. ( Institut National Polytechnique de Grenoble (France) )
Rousell, H.
Rousell, F.
Audier, M.
Dubourdieu, C.
Boyd, I.W. ( Univ. College London (United Kingdom) )
Fang, Q.
Leedham, T.L. ( Inorgtech, Ltd (United Kingdom) )
Rushworth, S.A.
Jones, A.C.
Davies, H.O.
Jimenez, C. ( JIPElec (France) )
さらに 11 件
掲載資料名:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4876
発行年:
2003
巻:
Part Two
開始ページ:
1236
終了ページ:
1246
総ページ数:
11
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819446572 [0819446572]
言語:
英語
請求記号:
P63600/4876
資料種別:
国際会議録

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