Femtosecond laser ablation of copper
- 著者名:
- Goh, Y.-W. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
- Lu, Y.F. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
- Hong, M.-H. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
- Chong, T.C. ( Data Storage Institute/National Univ. of Singapore (Singapore) )
- 掲載資料名:
- Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4830
- 発行年:
- 2003
- 開始ページ:
- 442
- 終了ページ:
- 446
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446015 [0819446017]
- 言語:
- 英語
- 請求記号:
- P63600/4830
- 資料種別:
- 国際会議録
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