Time-resolved monitoring of ZnO plume by ArF laser ablation: influence of surrounding gas
- 著者名:
- Kawaguchi, Y. ( National Institute of Advanced Industrial science and Technology (Japan) )
- Narazaki, A.
- Sato, T.
- Niino, H.
- 掲載資料名:
- Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4830
- 発行年:
- 2003
- 開始ページ:
- 132
- 終了ページ:
- 137
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819446015 [0819446017]
- 言語:
- 英語
- 請求記号:
- P63600/4830
- 資料種別:
- 国際会議録
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