Loss mechanisms in MEMS oscillators
- 著者名:
Vignola, J.F. ( Naval Research Lab. (USA) ) Simpson, H.J. ( Naval Research Lab. (USA) ) Liu, X. ( Naval Research Lab. (USA) ) Houston, B.H. ( Naval Research Lab .(USA) ) Photiadis, D.M. Marcus, M. Jarzynski, J. ( Naval Research Lab. (USA) ) Ilic, B. ( Cornell Univ. (USA) ) Czaplewski, D. Sekaric, L. Butler, J.E. ( Naval Research Lab. (USA) ) - 掲載資料名:
- Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 18-21 June 2002, Ancona, Italy
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4827
- 発行年:
- 2002
- 開始ページ:
- 466
- 終了ページ:
- 477
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445940 [0819445940]
- 言語:
- 英語
- 請求記号:
- P63600/4827
- 資料種別:
- 国際会議録
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