X-ray spectral measurements of the JMAR high-power laser-plasma source
- 著者名:
Whitlock, R.R. ( Naval Reseaarch Lab. (USA) ) Dozier, C.M. ( Geo-Centers, Inc. (USA) ) Newman, D.A. Turcu, I.C.E. ( JMAR Research, Inc. (USA) ) Gaeta, C.J. Cassidy, K.L. Powers, M.F. Kleindolph, T. Morris, J.H. Forber, R.A. - 掲載資料名:
- Advances in laboratory-based X-ray sources and optics III : 8 July, 2002, Seattle, Washington, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4781
- 発行年:
- 2002
- 開始ページ:
- 35
- 終了ページ:
- 41
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Washington: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445483 [0819445487]
- 言語:
- 英語
- 請求記号:
- P63600/4781
- 資料種別:
- 国際会議録
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7
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Advances in CPL, collimated plasma source and full field exposure for sub-100-nm lithography
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SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
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SPIE-The International Society for Optical Engineering |