Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology
- 著者名:
- Rammage, R.R. ( WaveFront Sciences, Inc. (USA) )
- Neal, D.R.
- Copland, R.J.
- 掲載資料名:
- Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4779
- 発行年:
- 2002
- 開始ページ:
- 161
- 終了ページ:
- 172
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445469 [0819445460]
- 言語:
- 英語
- 請求記号:
- P63600/4779
- 資料種別:
- 国際会議録
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3
国際会議録
Measurement of lens focal length using multicurvature analysis of Shack-Hartmann wavefront data
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