Far-infrared magneto-optic generalized ellipsometry determination of free-carrier parameters in semiconductor thin film structures

Far-infrared magneto-optic generalized ellipsometry determination of free-carrier parameters in semiconductor thin film structures

著者名:

Hofmann, T. ( Univ. Leipzig (Germany) )
Schubert, M.
Herzinger, C.M. ( J.A. Woollam Co. (USA) )

掲載資料名:

Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4779

発行年:

2002

開始ページ:

90

終了ページ:

97

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819445469 [0819445460]

言語:

英語

請求記号:

P63600/4779

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012616
シリーズID:	PA00000029
会議名:	Optics & Photonics : Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
回次:	2002
会議開催地:	Seattle, WA, USA
会議開催年:	2002.07.09-2002.07.11

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2 国際会議録 Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-？-nitride semiconductor … Schubert,M., Kasic,A., Figge,S., Diesselberg,M., Einfeldt,S., Hommel,D., Kohler,U., As,D.J., Off,J., Kuhn,B., Scholz,F., … SPIE-The International Society for Optical Engineering	8 国際会議録 Vector Magneto-Optical Generalized Ellipsometry on Passivated Permalloy Slanted Columnar Thin Films Daniel Schmidt, Chad Briley, Eva Schubert, Mathias Schubert Materials Research Society
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4 国際会議録 Application of generalized ellipsometry to complex optical systems Schubert,M., Rheinlander,B., Woollam,J.A., Johs,B.D., Herzinger,C.M. SPIE-The International Society for Optical Engineering	10 国際会議録 Terahertz Ellipsometry Using Electron-Beam Based Sources Tino Hofmann, Craig M. Herzinger, Ulrich Schade, Michael Mross, John A. Woollam, Mathias Schubert Materials Research Society
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6 国際会議録 Phonons and polaritons in semiconductor layer structures Schubert, M., Hofmann, T. SPIE-The International Society for Optical Engineering	12 国際会議録 Real-time monitoring and control during MBE growth of GaAs/AIGaAs Bragg reflectors using multiwave ellipsometry Wagner,T., Johs,B.D., Herzinger,C.M., He,P., Pittal,S., Woollam,J.A. SPIE-The International Society for Optical Engineering

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