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Optimal dynamic perfomance for high-precision actuators/stages

著者名:
掲載資料名:
Optomechanical design and engineering 2002 : 7-9 August 2002, Seattle, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4771
発行年:
2002
開始ページ:
91
終了ページ:
99
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445384 [081944538X]
言語:
英語
請求記号:
P63600/4771
資料種別:
国際会議録

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