Measuring and assessing printability of reticle pinhole defects
- 著者名:
- Taylor, D. ( Photronics Inc. (USA) )
- Vacca, A. ( KLA-Tencor Corp. (USA) )
- Zurbrick, L.S.
- Broadbent, W.H.
- Fiekowsky, P. ( AVI-Automated Visual Inspection (USA) )
- 掲載資料名:
- 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4764
- 発行年:
- 2002
- 開始ページ:
- 202
- 終了ページ:
- 209
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445315 [0819445312]
- 言語:
- 英語
- 請求記号:
- P63600/4764
- 資料種別:
- 国際会議録
類似資料:
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2
国際会議録
Improved method for measuring and assessing reticle pinhole defects for the 100-nm lithography node
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |