Measures to achieve 20-nm IPL stenecil mask distortion
- 著者名:
Hougeneder, E. ( IMS Nanofabrication GmbH (Austria) ) Chalupka A. Lammer, T. Loeschner, H. Kamm, F.-M. ( Infineon Technologies AG (Germany) ) Struck, T. Ehrmann, A. Kaesmaier, R. Wolter, A. Butschke, J. ( Institut fuer Mikroelektronik Stuttgart (Germany) ) Irmscher, M. Letzkus, F. Springer, R. - 掲載資料名:
- 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4764
- 発行年:
- 2002
- 開始ページ:
- 23
- 終了ページ:
- 31
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445315 [0819445312]
- 言語:
- 英語
- 請求記号:
- P63600/4764
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
4
国際会議録
Large-field ion optics for projection and proximity printing and for maskless lithography (MLZ)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |