Comb drives: versatile microstructures for capacitive sensing and electrostatic actuation
- 著者名:
- Krijnen, G.J.M. ( Univ. of Twente (Netherlands) )
- Kuijpers, T.
- Lammerink, T.
- Wiegerink, R.
- Elwenspoek, M.
- 掲載資料名:
- European workshop on smart structures in engineering and technology : 21-23 May 2002, Presqu'île de Giens, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4763
- 発行年:
- 2003
- 開始ページ:
- 201
- 終了ページ:
- 206
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445292 [0819445290]
- 言語:
- 英語
- 請求記号:
- P63600/4763
- 資料種別:
- 国際会議録
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