Pulsed-laser deposited TiC coatings for MEMS
- 著者名:
- Radhakrishnan, G. ( The Aerospace Corp. (USA) )
- Adams, P.M.
- Robertson, R.E.
- Cole, R. C.
- 掲載資料名:
- High-Power Laser Ablation IV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4760
- 発行年:
- 2002
- 巻:
- Part One
- 開始ページ:
- 289
- 終了ページ:
- 300
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445247 [081944524X]
- 言語:
- 英語
- 請求記号:
- P63600/4760
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Investigation of the deposition and integration of hard coatings for moving MEMS applications
MRS-Materials Research Society |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
3
国際会議録
Fabrication and RF Properties of Titanium Carbide/Gold Coplanar Waveguides for RF MEMS Applications
Materials Research Society |
9
国際会議録
In Vivo Evaluation of Pulsed Laser Deposited Hydroxyapatite Coating for Prosthesis-Bone Bonding
MRS - Materials Research Society |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society | |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |