Blank Cover Image

New techniques for laser micromachining MEMS devices (Invited Paper)

著者名:
Abbott, C. ( Exitech Ltd. (UK) )
Allott, R.M.
Bann, B.
Boehlen, K.L.
Gower, M.C.
Rumsby, P.T.
Stassen Boehlen, I.
Sykes, N.
さらに 3 件
掲載資料名:
High-Power Laser Ablation IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4760
発行年:
2002
巻:
Part One
開始ページ:
281
終了ページ:
288
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445247 [081944524X]
言語:
英語
請求記号:
P63600/4760
資料種別:
国際会議録

類似資料:

1 国際会議録 Laser micromachining techniques for industrial MEMS applications

Booth, H.J., Abbott, C.E., Allott, R.M., Boehlen, K.L., Fieret, J., Greuters, J., Trimble, P., Pedder, J.

SPIE - The International Society of Optical Engineering
7 国際会議録 High speed laser cutting of micro structures with submicron details [6261-83]

Boehlen, L. K., Rumsby, T. P., Sykes, N., Lefevre, C.

SPIE - The International Society of Optical Engineering
2 国際会議録 Advanced laser micro-structuring of super-large-area optical films

Boehlen, K.L., Boehlen, I.B.Stassen, Allott, R.M.

SPIE - The International Society of Optical Engineering
8 国際会議録 Laser micromachining of high-density optical structures on large substrates

Boehlen, K.L., Stassen Boehlen, I.B.

SPIE - The International Society of Optical Engineering
3 国際会議録 Laser micromachining for manufacturing MEMS devices

Gower,M.C.

SPIE-The International Society for Optical Engineering
9 国際会議録 Fabrication of axisymmetric ceramic microparts using pulsed laser ablation

Boehlen-Stassen,K.L., Rumsby,P.T., Cerezo,A., Huang,M.

SPIE-The International Society for Optical Engineering
4 国際会議録 Laser micromachining:new developments and applications

Rizvi,N.H., Milne,D.K., Rumsby,P.T., Gower,M.C.

SPIE - The International Society for Optical Engineering
10 国際会議録 X-ray micromachining with a laser-plasma source at 1-nm wavelength (Invited Paper)

Turcu,I.C.E., Mann,C.M., Moon,S.W., Maddison,B.J., Allott,R.M., Lisi,N., Huq,S.E., Kim,N.S.

SPIE-The International Society for Optical Engineering
5 国際会議録 New developments and applications in the production of 3D microstructures by laser micromachining

Rizvi,N.H., Rumsby,P.T., Gower,M.C.

SPIE - The International Society for Optical Engineering
11 国際会議録 Industrial applications of pulsed lasers to materials microprocessing (Invited Paper)

Gower,M.C.

SPIE-The International Society for Optical Engineering
6 国際会議録 193-nm excimer laser microstepper system (Invited Paper)

Rizvi,N.H., Cashmore,J.S., Solomon,C.M., Rumsby,P.T., Gower,M.C.

SPIE-The International Society for Optical Engineering
12 国際会議録 193-nm imaging using a small-field high-resolution imaging resist exposure tool

Rizvi,N.H., Gower,M.C., Ashworth,D., Sykes,N., Rumsby,P.T., Smith,B.W., Goodall,F.N., Lawes,R.A.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12