Fully CMOS-compatible low-power microheater

Fully CMOS-compatible low-power microheater

著者名:

Laconte, J. ( Univ. Catholique de Louvain (Belgium) )
Dupont, C.
Akheyar, A.
Raskin, J.-P.
Flandre, D.

掲載資料名:

Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4755

発行年:

2002

開始ページ:

634

終了ページ:

644

総ページ数:

11

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819445186 [0819445185]

言語:

英語

請求記号:

P63600/4755

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012592
シリーズID:	PA00000029
会議名:	Design, test, integration, and packaging of MEMS/MOEMS
回次:	2002
会議開催地:	Cannes, France
会議開催年:	2002.05.06-2002.05.08

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