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Low-cost thermal flow sensor for home-appliances applications

著者名:
Sabate, N. ( Ctr. National de Microelectronica (Spain) )
Gracia, I.
Cane, C.
Berganzo, J. ( IKERLAN (Spain) )
Puicorbe, J. ( Univ. de Barcelona (Spain) )
Morante, J.R.
さらに 1 件
掲載資料名:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4755
発行年:
2002
開始ページ:
549
終了ページ:
555
総ページ数:
7
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
言語:
英語
請求記号:
P63600/4755
資料種別:
国際会議録

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