Efforts in developing design and simulation tools for MEMS: DS/MEMS and CA/MEMS
- 著者名:
Youn, S.-K. ( Korea Advanced Institute of Science and Technology ) Kwak, B. Kwon, J.-H. Chang, S.-Y. Huh, J. Kim, E. - 掲載資料名:
- Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4755
- 発行年:
- 2002
- 開始ページ:
- 275
- 終了ページ:
- 284
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445186 [0819445185]
- 言語:
- 英語
- 請求記号:
- P63600/4755
- 資料種別:
- 国際会議録
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