Blank Cover Image

Modeling methodology for a CMOS-MEMS electrostatic comb

著者名:
掲載資料名:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4755
発行年:
2002
開始ページ:
114
終了ページ:
125
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
言語:
英語
請求記号:
P63600/4755
資料種別:
国際会議録

類似資料:

1 国際会議録 Numerical spring models for behavioral simulation of MEMS inertial sensors

Iyer,S.V., Mukherjee,T.

SPIE - The International Society for Optical Engineering
7 国際会議録 MEMS resonator synthesis for testability

Deb,N., lyer,S.V., Mukherjee,T., Blanton,R.D.S.

SPIE - The International Society for Optical Engineering
2 国際会議録 Design and simulation of thermal actuators for STM applications in a standard CMOS process

Eagle,S., Lakdawala,H., Fedder,G.K.

SPIE - The International Society for Optical Engineering
8 国際会議録 Modeling and simulation of silicon micromechanical electrostatic comb-drive resonator [6149-51]

Yin, S., Zhang, Y. K., Zhou, J.

SPIE - The International Society of Optical Engineering
3 国際会議録 Fault modeling of electrostatic comb-drives for MEMS

Charlot,B., Moussouris,S., Mir,S., Courtois,B.

SPIE - The International Society for Optical Engineering
9 国際会議録 Atomistic Models for Nanotube Device Electrostatics.

Rotkin, S.V., Bulashevich, K.A., Aluru, N.R.

Electrochemical Society
4 国際会議録 Mechanical effects of fatigue and charge on CMOS MEMS

Frederick,K.M., Fedder,G.K.

SPIE-The International Society for Optical Engineering
10 国際会議録 MEMS-based endoscopic optical coherence tomography (Invited Paper)

Xie, H., Fedder, G.K., Pan, Y.

SPIE - The International Society of Optical Engineering
5 国際会議録 Analysis of a novel MEMS electrostatic comb actuator for optical switching

Yu, P., Wang, G., Chen, M., Xie, S.

SPIE-The International Society for Optical Engineering
11 国際会議録 Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching

Lee,J.-Y., Kim,S.-H., Lim,H.-T., Kim,C.-H., Kim,Y.-K.

SPIE-The International Society for Optical Engineering
6 国際会議録 Factorial Experiment on CMOS-MEMS RIE Post Processing

Zhu, X., Greve, D.W., Lawton, R., Presser, N., Fedder, G.K.

Electrochemical Society
12 国際会議録 Modeling and Stability Analysis of Comb-Fingers in MEMS Electrostatic Actuators

Yang-Che Chen, Ian Chao-Ming Chang, Rongshun Chen, Max Ti-Kuang Hou

American Society of Mechanical Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12