Integration of a network solver and a field solver for the mixed level thermal simulation of MEMS problems
- 著者名:
- Rencz, M. ( MicReD Ltd. (Hungary) )
- Szekely, V. ( Budapest Univ. of Technology and Economics (Hungary) )
- Poppe, A. ( MicReD Ltd. (Hungary) )
- 掲載資料名:
- Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4755
- 発行年:
- 2002
- 開始ページ:
- 36
- 終了ページ:
- 43
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445186 [0819445185]
- 言語:
- 英語
- 請求記号:
- P63600/4755
- 資料種別:
- 国際会議録
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