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Improved convergence of electromechanical transducer element

著者名:
掲載資料名:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4755
発行年:
2002
開始ページ:
20
終了ページ:
27
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
言語:
英語
請求記号:
P63600/4755
資料種別:
国際会議録

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