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Ultrasonic atomic force microscopy with real-time mapping of resonance frequency and Q factor (Invited Paper)

著者名:
掲載資料名:
Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4703
発行年:
2002
開始ページ:
85
終了ページ:
92
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444516 [0819444510]
言語:
英語
請求記号:
P63600/4703
資料種別:
国際会議録

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