High-yield microfabrication process for biomimetic artificial haircell sensors
- 著者名:
- 掲載資料名:
- Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4700
- 発行年:
- 2002
- 開始ページ:
- 315
- 終了ページ:
- 322
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444486 [0819444480]
- 言語:
- 英語
- 請求記号:
- P63600/4700
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers | |
6
国際会議録
Development of a CMOS-compatible process for a silicon miniature microphone with high sensitivity
SPIE-The International Society for Optical Engineering |
12
国際会議録
Development of the circuit system in high frequency satellite laser ranging equipment based on FPGA
Society of Photo-optical Instrumentation Engineers |