Development of micromachined RF switches with piezofilm actuation
- 著者名:
- Fox, C.H.J. ( Univ. of Nottingham (UK) )
- Chen, X.
- Jiang, H.W. ( Cranfield Univ. (UK) )
- Kirby, P.B.
- McWilliam, S. ( Univ. of Nottingham (UK) )
- 掲載資料名:
- Smart structures and materials 2002 : smart electronics, MEMS, and nanotechnology : 18-21 March 2002, San Diego, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4700
- 発行年:
- 2002
- 開始ページ:
- 40
- 終了ページ:
- 49
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444486 [0819444480]
- 言語:
- 英語
- 請求記号:
- P63600/4700
- 資料種別:
- 国際会議録
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