Highly manufacturable capacitor-less 1T-DRAM concept(Invited Paper)
- 著者名:
- Fazan, P.C. ( Swiss Federal Institute of Technology Lausanne and Innovative Silicon Solutions (Switzerland) )
- Okhonin, S. ( Swiss Federal Institute of Technology Lausanne )
- Nagoga, M.
- Sallese, J.M.
- 掲載資料名:
- Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4692
- 発行年:
- 2002
- 開始ページ:
- 489
- 終了ページ:
- 502
- 総ページ数:
- 14
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444394 [0819444391]
- 言語:
- 英語
- 請求記号:
- P63600/4692
- 資料種別:
- 国際会議録
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12
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