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Analysis of focus errors in lithography using phase-shift monitors

著者名:
La Fontaine, B. ( Advanced Micro Devices, Inc. (USA) )
Dusa, M.V. ( ASML (USA) )
Krist, J.
Acheta, A. ( Advanced Micro Devices, Inc. (USA) )
Kye, J.
Levinson, H.J.
Luijten, C. ( ASML (USA) )
Sager, C.B. ( Benchmark Technoloties, Inc. (USA) )
Thomas, J. ( Advanced Micro Devices, Inc. (USA) )
van Praagh, J. ( ASML (Netherlands) )
さらに 5 件
掲載資料名:
Optical Microlithography XV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4691
発行年:
2002
巻:
Part One
開始ページ:
315
終了ページ:
324
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
言語:
英語
請求記号:
P63600/4691
資料種別:
国際会議録

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