Subwavelength lithography: an impact of photomask errors on cricuit performance
- 著者名:
- Karklin, L. ( Numerical Technologies, Inc. (USA) )
- Mazor, S.
- Joshi, D.
- Balasinski, A. ( Cypress Semiconductor Corp. (USA) )
- Axelrad, V. ( Sequoia Design Systems, Inc. (USA) )
- 掲載資料名:
- Optical Microlithography XV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4691
- 発行年:
- 2002
- 巻:
- Part One
- 開始ページ:
- 259
- 終了ページ:
- 267
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- 言語:
- 英語
- 請求記号:
- P63600/4691
- 資料種別:
- 国際会議録
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9
国際会議録
Physical and timing verification of subwavelength-scale designs: I. Lithography impact on MOSFETs
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |