Fullerene incorporation in DNQ Novolak photoresist for increasing plasma etch resistance
- 著者名:
- Benson, J.D. ( U.S. Army Night Vision & Electronic Sensors Directorate )
- Stoltz, A.J., Jr.
- Kaleczyc, A.W.
- Dinan, J.H.
- 掲載資料名:
- Advances in Resist Technology and Processing XIX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4690
- 発行年:
- 2002
- 巻:
- Part Two
- 開始ページ:
- 1224
- 終了ページ:
- 1227
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444363 [0819444367]
- 言語:
- 英語
- 請求記号:
- P63600/4690
- 資料種別:
- 国際会議録
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4
国際会議録
Simulation of structure profiles in optical lithography of thick DNQ-novolak-based photoresists
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