Planarization for the integration of CMOS and micromirror arrays
- 著者名:
- Zheng, Y. ( QSS Group, Inc. (USA) )
- Dutta, M.B. ( NASA Goddard Space Flight Ctr. (USA) )
- Kotecki, C.A.
- Zincke, C.A. ( QSS Group, Inc. (USA) )
- 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XVI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4689
- 発行年:
- 2002
- 巻:
- Part Two
- 開始ページ:
- 1070
- 終了ページ:
- 1076
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- 言語:
- 英語
- 請求記号:
- P63600/4689
- 資料種別:
- 国際会議録
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11
国際会議録
Development and production integration of a planarized AlCu interconnect process for submicron CMOS
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