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Using carbon nanotube cantilevers in scanning probe metrology

著者名:
Schlaf, R. ( Univ. of South Florida (USA) )
Emirov, Y.
Bieber, J.A.
Sikder, A.
Kohlscheen, J.
Walters, D.A. ( Univ. of Central Florida (USA) )
Islam, M.R.
Metha, B.
Ren, Z.F. ( Boston College (USA) )
Shofner, T.L. ( Agere Systems (USA) )
Rossie, B.B.
Cresswell, M.W. ( National Institute of Standaras and Technology (USA) )
さらに 7 件
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XVI
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4689
発行年:
2002
巻:
Part One
開始ページ:
53
終了ページ:
57
総ページ数:
5
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
言語:
英語
請求記号:
P63600/4689
資料種別:
国際会議録

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