Laser ablation of nitrogen-solid films by UV ps-laser irradiation: surface modification of materials by fragments in laser ablation plume (Invited Paper)
- 著者名:
- Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) )
- Sato, T.
- Narazaki, A.
- Kawaguchi, Y.
- Yabe, A.
- 掲載資料名:
- Photon Processing in Microelectronics and Photonics
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4637
- 発行年:
- 2002
- 開始ページ:
- 135
- 終了ページ:
- 147
- 総ページ数:
- 13
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443762 [081944376X]
- 言語:
- 英語
- 請求記号:
- P63600/4637
- 資料種別:
- 国際会議録
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Laser ablation plume of FeSi2 alloy target studied by TOF mass and optical emission spectroscopies
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