Background gas effects on structural properties in thin films deposited by pulsed laser deposition
- 著者名:
- Yamada, Y. ( Matsushita Electric Industrial Co., Ltd. (Japan) )
- Suzuki, N.
- Makino, T.
- Yoshida, T.
- 掲載資料名:
- Photon Processing in Microelectronics and Photonics
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4637
- 発行年:
- 2002
- 開始ページ:
- 119
- 終了ページ:
- 126
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443762 [081944376X]
- 言語:
- 英語
- 請求記号:
- P63600/4637
- 資料種別:
- 国際会議録
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