Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching
- 著者名:
Pan, Y. ( Changchun Institute of Optics,Fine Mechanics, and Physics (China) ) Ning, Y. ( Lab. of Excited State Processes (China) ) Qin. L. ( Changchun Institute of Optics,Fine Mechanics and Physics (China) ) Suo, H. Liu, Y. Wang, L. ( Lab. of Excited State Processes (China) ) - 掲載資料名:
- Micromachining and Microfabrication Process Technology and Devices
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4601
- 発行年:
- 2001
- 開始ページ:
- 360
- 終了ページ:
- 362
- 総ページ数:
- 3
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- 言語:
- 英語
- 請求記号:
- P63600/4601
- 資料種別:
- 国際会議録
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