Surface relief of TiNiCu thin films
- 著者名:
Cheng, X. ( Shanghai Jiaotong Univ. (China) ) Xu, D. Cai, B. Wang, L. Chen, J. Li, G. Xu, S. - 掲載資料名:
- Micromachining and Microfabrication Process Technology and Devices
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4601
- 発行年:
- 2001
- 開始ページ:
- 340
- 終了ページ:
- 345
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- 言語:
- 英語
- 請求記号:
- P63600/4601
- 資料種別:
- 国際会議録
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