Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography
- 著者名:
- Jiang, H.J. ( Nanyang Technological Univ. (Singapore) )
- Yuan, X.-C.
- Cheong, W.C.
- 掲載資料名:
- Design, fabrication, and characterization of photonic devices : 27-30 November 2001, Singapore
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4594
- 発行年:
- 2001
- 開始ページ:
- 104
- 終了ページ:
- 109
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443243 [0819443247]
- 言語:
- 英語
- 請求記号:
- P63600/4594
- 資料種別:
- 国際会議録
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9
国際会議録
Thick hybrid silica-zirconia sol-gel film for single-step fabrication of channel waveguide [6123-18]
SPIE - The International Society of Optical Engineering |
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