Novel design and fabrication of Si optical bench

Novel design and fabrication of Si optical bench

著者名:

Choi, H. ( Samsung Advanced Institute of Technology (Korea) )

掲載資料名:

Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4593

発行年:

2001

開始ページ:

137

終了ページ:

144

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443236 [0819443239]

言語:

英語

請求記号:

P63600/4593

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012421
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
回次:	2001 : 2nd
会議開催地:	Adelaide, Australia
会議開催年:	2001.12.17-2001.12.19

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