Materials and reliability issues in MEMS and microsystems

Materials and reliability issues in MEMS and microsystems

著者名:: Christou, A. ( Univ. of Maryland/College Park (USA) )
掲載資料名:: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 4592
発行年:: 2001
開始ページ:: 326
終了ページ:: 333
総ページ数:: 8
出版情報:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819443229 [0819443220]
言語:: 英語
請求記号:: P63600/4592
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00012420
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS and Microelectronics
回次:	2001 : 2nd
会議開催地:	Adelaide, Australia
会議開催年:	2001.12.17-2001.12.19

類似資料:

1 国際会議録 Reliability of High Speed HEMT integrated Circuits and Multi-2DEG Structures Christou A. Kluwer Academic Publishers	7 国際会議録 Testing reliability of MEMS materials in liquids T. P. Kuehn, S. M. Ali, S. C. Mantell, E. K. Longmire SPIE - The International Society of Optical Engineering
2 国際会議録 Reliability of MEMS (microsystems) for space applications H. R. Shea ESA Publications Division	8 国際会議録 Status of Compound Semiconductor Device Reliability Anderson T. W., Christou A. Kluwer Academic Publishers
3 国際会議録 Assembly process issues and reliability in microsystem packaging Spangler, L. SPIE - The International Society of Optical Engineering	9 国際会議録 GaAs-on-Si MSM photodetector: FET receiver characterization and reliability Feng,T., Dimoulas,A., Christou,A. SPIE-The International Society for Optical Engineering
4 国際会議録 MEMS Packaging Issues and Materials Gilleo,Ken IMAPS	10 国際会議録 Design of MEMS and microsystems Nagel,D.J. SPIE - The International Society for Optical Engineering
5 国際会議録 Physical and reliability issues in MEMS microrelays with gold contacts Lafontan,X., Pressecq,F., Perez,G., Dufaza,C., Karam,J.-M. SPIE-The International Society for Optical Engineering	11 国際会議録 Optical MEMS at Silex Microsystems Rimskog, M., Kaelvesten, E., Svedin, N. SPIE - The International Society of Optical Engineering
6 国際会議録 Reliability issues of COTS MEMS for aerospace applications Ramesham,R., Ghaffarian,R., Kim,N.P. SPIE - The International Society for Optical Engineering	12 国際会議録 AN EXPERIMENTAL EXAMINATION OF MEMS MICROACTUATOR MATERIAL ISSUES Cooney, T. G., Glumac, D. E., Robbins, W. P., Francis, L. F. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12