Integration of active materials with silicon micromachining: applications to optical MEMS (Invited Paper)
- 著者名:
- Gouy, J.-P. ( LIMMS/CNRS/Univ. of Tokyo (Japan) )
- Arakawa, Y. ( Univ. of Tokyo (Japan) )
- Fujita, H.
- 掲載資料名:
- Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4592
- 発行年:
- 2001
- 開始ページ:
- 292
- 終了ページ:
- 298
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443229 [0819443220]
- 言語:
- 英語
- 請求記号:
- P63600/4592
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |