Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching

Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching

著者名:

Chang, K.M. ( National Chiao Tung Univ. (Taiwan) )
You, K.S.
Wu, C.H. ( Synchrotron Radiation Research Ctr. (Taiwan) )
Sheu, J.T.

掲載資料名:

Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4592

発行年:

2001

開始ページ:

34

終了ページ:

42

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443229 [0819443220]

言語:

英語

請求記号:

P63600/4592

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012420
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS and Microelectronics
回次:	2001 : 2nd
会議開催地:	Adelaide, Australia
会議開催年:	2001.12.17-2001.12.19

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