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Large-displacement microactuators in deep reactive ion-etched single-crystal silicon

著者名:
掲載資料名:
MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4559
発行年:
2001
開始ページ:
138
終了ページ:
147
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442871 [0819442879]
言語:
英語
請求記号:
P63600/4559
資料種別:
国際会議録

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