Parametric monitoring for the SUMMiT V surface-micromachining process
- 著者名:
Oliver,A.D. ( Sandia National Labs. ) Tanner,D.M. Mani,S.S. Swanson,S.E. Helgesen,K.S. Smith,N.F. - 掲載資料名:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4558
- 発行年:
- 2001
- 開始ページ:
- 242
- 終了ページ:
- 253
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- 言語:
- 英語
- 請求記号:
- P63600/4558
- 資料種別:
- 国際会議録
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